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100mm x 100mm Eucentric
UST-5500 Cartesian
UST-5800 Cartesian
Additional Stages


E. Fjeld Company
152 Rangeway Road
North Billerica, MA 01862
USA

Phone: (978) 667-1416
Fax:      (978) 667-9059
email:  sales@efjeld.com

Web:    www.efjeld.com

 


 

       70mm x 90mm 5-Axis Cartesian Stage

UST - 5500

Ultra Smooth Translation

E. Fjeld - UST-5500

Description

The UST-5500 has been designed by the E. Fjeld Company as a direct replacement stage for the Hitachi S-4000 series Field Emission Scanning Electron Microscope (FE-SEMs).

The stage and drive electronics of the UST-5500 incorporate advanced technologies to enable high resolution imaging and smooth motion at high magnifications.  Conventional designs utilize comparatively large step-sizes and non-optimal drive methods, that cause the SEM image to "jump" at very high magnifications and slow speeds.  Many users resort to using the SEM's electronic "Beam" or "Image" shift, which may introduce problems such as beam distortion, image shift run-out (inability to further deflect the beam), and loss of sample addressability (inability to determine exactly where the beam is striking the sample).  The UST-5500 overcomes these limitations by allowing accurate positioning, smooth motion, and slow speeds at high magnifications, all without using image shift.

The UST-5500 is beneficial in many applications, including:

Locating and imaging specific DRAM cells in the semiconductor industry

Examining critical surfaces of medical devices for stress and fractures

Imaging defects and contamination for X-ray analysis

UST-5500
Ultra Smooth Motion stage for Hitachi SEMs

High resolution stepping motors on all axes (X, Y, Z, T and R) of the UST-5500 specimen stage.  The Y, Z, T and R motors are internally mounted and vacuum prepped by E. Fjeld Co.  The X motor is mounted externally and directly coupled to the drive mechanics of the stage.  Other features include:

BNC ground connector for beam current measurement

Optical reference sensors for maximum reliability

Teflon wiring for durability and vacuum compatibility

UST-5500 Internals
Stage Limits of Motion

X :  0 - 95 mm

Y :  0 - 70 mm

Z :  0 - 30 mm

TILT : -5 to +90 Degrees

ROTATION : 360 Degrees Continuous

Advanced Microstepping Motor Drive

Configured to drive the five axis UST-5500 stage

Ultra smooth stage motion at high magnification

Low EMI design prevents electron beam interference

Display and Joystick Features

Display:
 

Coordinate readout of all axes positions and status (referencing, in motion, etc)

Indicates currently selected axes and speed ranges

Thin film electro-luminescent display with 160 degree viewing angle

Quarter VGA (320 x 240) display size


Joystick:
 

Complete five axis joystick control, drive 3 axes simultaneously

Joystick-selectable variable speed ranges

Convenient LOAD button returns stage to the sample exchange position

5 Pushbuttons - Reference, Load, Speed range up/down, Axes select

UST-5500 Stage - Joystick

Stage Lock

"Set Once" stage lock features no motion limiting or settling time

All axes are free to be driven while the lock is engaged

UST-5500 Stage Lock

Quality Assurance

Stage and Electronics undergo rigorous cycle testing

All vacuum components are helium leak checked to current industry standards

Stages are transported in a vacuum vessel to minimize contamination during shipping

Also Available: Coordinate Storage Software

Software package designed for storage and recall of axis coordinates.  Allows several different modes of addressing, including absolute, offset absolute, and relative.

Stage Control Software Optional

 Additional Images For UST - 5500

Copyright 2003 E. Fjeld Company, Inc