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A100 Automatic Airlock
A200 Automatic Airlock
M-100 Manual Airlock
M-200 Manual Airlock

E. Fjeld Company
152 Rangeway Road
North Billerica, MA 01862

Phone: (978) 667-1416
Fax:      (978) 667-9059
email:  sales@efjeld.com

Web:    www.efjeld.com



       100mm Manual Airlock


E. Fjeld - M-100 Manual Exchange System


The E. Fjeld 100mm manual Airlock has been designed to allow the user to quickly and easily transfer samples to the imaging stage.
100mm Manual Airlock - General

Accepts sample sizes up to 101.4mm (4 inches) in diameter easily, quickly and safely

Front viewing window permits excellent sample inspection while in vacuum

Interfaces to tool via integrated gate valve

Integrated illumination source facilitates sample placement onto stage 


Safety features

Sample exchange rod interlock prevents gate valve operation if rod is not fully retracted

User interlock from tool prevents gate valve operation in unsafe or undesirable conditions

Vacuum interlock prevents gate valve opening unless under vacuum

Vent commands are ignored unless gate valve is closed


Sample Throughput

Three internal, indexable  sample holder stations allow multiple sample holders to be preloaded  

"Quick Fit" dovetail design on sample holder allows quick sample exchanges, yet hold samples securely

Internal airlock surfaces are highly polished and nickel plated to reduce pump-down time



Optional sample holders available, including single-sample, multi-sample, wafer, and custom

Available vacuum pumps include conventional roughing, Scroll, and Turbo

Quality Assurance

All equipment undergo rigorous inspection and testing

All vacuum components are helium leak checked to current industry standards

Factory integrated to ensure product specification compliance



 Additional Images For M-100

Copyright 2003 E. Fjeld Company, Inc