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A100 Automatic Airlock
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M-200 Manual Airlock


E. Fjeld Company
152 Rangeway Road
North Billerica, MA 01862
USA

Phone: (978) 667-1416
Fax:      (978) 667-9059
email:  sales@efjeld.com

Web:    www.efjeld.com

 


 

       200mm Manual Airlock

M-200

E. Fjeld - M-200 Manual Exchange System

Description

The E. Fjeld 200mm manual Airlock has been designed to allow the user to quickly and easily transfer samples to the imaging stage.
200mm Manual Airlock - General

Accepts sample sizes up to 204mm (8 inches) by 47 mm (1 3/4 inches) high easily, quickly and safely

Two viewing windows (top and front) permit excellent sample inspection while in vacuum

Interfaces to tool via industry standard VAT valve

 

Safety features

Sample exchange rod interlock prevents gate (VAT) valve operation if rod is not fully retracted

User interlock from tool prevents gate valve operation in unsafe or undesirable conditions

Vacuum interlock prevents gate valve opening unless under vacuum

Vent commands are ignored unless gate valve is closed

 

Sample Throughput

Three internal, indexable  sample holder stations allow multiple sample holders to be preloaded, further reducing pumping / venting delays  

"Quick Fit" dovetail design on sample holder allows quick sample exchanges, yet hold samples securely

Internal airlock surfaces are highly polished and nickel plated to reduce pump-down time

 

Options

Optional sample holders available, including single-sample, multi-sample, wafer, and custom

Available vacuum pumps include conventional roughing, Scroll, and Turbo
 

Quality Assurance

All equipment undergo rigorous inspection and testing

All vacuum components are helium leak checked to current industry standards

Factory integrated to ensure product specification compliance

 

   

 Additional Images For M-200

Copyright 2003 E. Fjeld Company, Inc